White light interferometer - List of Manufacturers, Suppliers, Companies and Products

[Analysis Case] Observation of Crosshatch Pattern Shape

It is possible to visualize small irregularities with high vertical resolution.

A scanning white light interferometer (optical interferometer) can perform high-precision non-contact three-dimensional measurements of the surface shape of a sample with "high vertical (Z) resolution (0.1 nm) and a wide (X-Y) measurement field of view (50 μm to 4.2 mm)." An example of observing the surface shape of a Si/SiGe layered sample (crosshatch pattern) is presented. Shape evaluation with an average roughness (Ra) of approximately 1 nm is possible.

• Company：一般財団法人材料科学技術振興財団　MST
• Price：Other

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